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Updated: Mar 21, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
High-Q side-coupled semi-2D-photonic crystal cavity
Jianhao Zhang1, Weixi Liu1, Yaocheng Shi1
1State Key Laboratory for Modern Optical Instrumentation, Centre for Optical and Electromagnetic Research, Zhejiang Provincial Key Laboratory for Sensing Technologies, East Building No. 5, Zijingang Campus, Zhejiang University, Hangzhou 310058, China.
Abstract:
High-Q semi-2D-photonic crystal cavities with a tapered edge and side-coupled bus waveguide are demonstrated. With a quadratic design, the unloaded cavity presents a theoretical ultrahigh quality factor up to 6.7 × 10(7) for the condition that there are mere 34 holes in the propagated direction, which is pretty close to the 2D and 1D counterpart. Combined with a side-coupled bus waveguide, an all-pass-type cavity with a loaded quality factor (Q) of over 2.4 × 10(4) and an extinction ratio over 10 dB are experimentally demonstrated. An experimental loaded Q up to 1.1 × 10(5) are also achieved by tuning the coupling between the cavity and the bus waveguide, which is much larger than any reported surface-mode cavity. This cavity is quite suitable for sensors, filters and especially optomechanical devices thanks to the mechanical stability of the cavity and flexibility of the bus waveguide.

