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Updated: Mar 20, 2026

Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
Published on: September 8, 2017
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
Mohammadreza Khorasaninejad1, Wei Ting Chen1, Robert C Devlin1
1Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA.
Abstract:
Subwavelength resolution imaging requires high numerical aperture (NA) lenses, which are bulky and expensive. Metasurfaces allow the miniaturization of conventional refractive optics into planar structures. We show that high-aspect-ratio titanium dioxide metasurfaces can be fabricated and designed as metalenses with NA = 0.8. Diffraction-limited focusing is demonstrated at wavelengths of 405, 532, and 660 nm with corresponding efficiencies of 86, 73, and 66%. The metalenses can resolve nanoscale features separated by subwavelength distances and provide magnification as high as 170×, with image qualities comparable to a state-of-the-art commercial objective. Our results firmly establish that metalenses can have widespread applications in laser-based microscopy, imaging, and spectroscopy.
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