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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
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Quantitative atomic resolution elemental mapping via absolute-scale energy dispersive X-ray spectroscopy.
1School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia.
Ultramicroscopy
|June 4, 2016
Summary
Quantitative agreement was achieved between experimental and simulated atomic-resolution elemental mapping using energy dispersive X-ray spectroscopy (EDX). Careful characterization confirmed predictions about probe aperture effects on signal channeling.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Energy dispersive X-ray spectroscopy (EDX) is crucial for elemental mapping.
- Accurate quantitative analysis requires precise experimental parameter control and validated simulations.
- Electron scattering and channeling effects complicate signal interpretation in EDX.
Purpose of the Study:
- To demonstrate quantitative agreement between EDX experiments and simulations for atomic-resolution elemental mapping.
- To validate simulation models by comparing them against carefully characterized experimental data.
- To investigate factors influencing signal accuracy, including probe aperture size and sample thickness.
Main Methods:
- Performing two-dimensional, atomic-resolution elemental mapping using EDX.
- Conducting detailed simulations of the EDX signal generation and detection process.
- Carefully characterizing all experimental parameters, including probe forming aperture and sample thickness.
- Analyzing discrepancies between experimental results and simulations to identify contributing factors.
Main Results:
- Achieved quantitative agreement on an absolute scale between EDX experiment and simulation.
- Confirmed that increasing the probe forming aperture suppresses channeling enhancement in the average signal.
- Identified and discussed discrepancies, attributing them to factors like electron scattering.
- Highlighted the compromise needed in sample thickness for accurate column-by-column analysis.
Conclusions:
- Validated the use of simulations for quantitative, atomic-resolution elemental mapping with EDX.
- Emphasized the critical role of precise experimental parameter control for accurate EDX analysis.
- Provided insights into optimizing EDX data acquisition and interpretation by understanding electron scattering and channeling effects.
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