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Updated: Mar 19, 2026

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
Published on: June 16, 2014
Electron collisions with atoms, ions, molecules, and surfaces: Fundamental science empowering advances in technology
Klaus Bartschat1, Mark J Kushner2
1Department of Physics and Astronomy, Drake University, Des Moines, IA 50311; klaus.bartschat@drake.edu.
Abstract:
Electron collisions with atoms, ions, molecules, and surfaces are critically important to the understanding and modeling of low-temperature plasmas (LTPs), and so in the development of technologies based on LTPs. Recent progress in obtaining experimental benchmark data and the development of highly sophisticated computational methods is highlighted. With the cesium-based diode-pumped alkali laser and remote plasma etching of Si3N4 as examples, we demonstrate how accurate and comprehensive datasets for electron collisions enable complex modeling of plasma-using technologies that empower our high-technology-based society.
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