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Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography.

Katherine P Rice1, Yimeng Chen1, Ty J Prosa1

  • 1CAMECA Instruments Inc.,5500 Nobel Dr.,Madison,WI 53711,USA.

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Summary
This summary is machine-generated.

Combining transmission electron backscattering diffraction (tEBSD) with focused ion beam (FIB) preparation for atom probe tomography (APT) enhances grain boundary analysis. This integrated approach improves specimen targeting and reveals detailed chemical and orientation information.

Keywords:
FIBTKDatom probe tomographygrain boundary analysistransmission EBSD

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Analytical Chemistry

Background:

  • Transmission electron backscattering diffraction (tEBSD) and atom probe tomography (APT) are powerful techniques for materials characterization.
  • Accurate placement of microstructural features, such as grain boundaries, is crucial for correlative analysis.
  • Focused ion beam (FIB) milling is commonly used for APT specimen preparation.

Purpose of the Study:

  • To demonstrate the advantages of integrating tEBSD with FIB-APT specimen preparation.
  • To optimize tEBSD parameters for FIB-milled specimens.
  • To achieve combined chemical and orientation characterization of grain boundaries.

Main Methods:

  • Utilized focused ion beam (FIB) milling for site-specific specimen preparation for APT.
  • Employed transmission electron backscattering diffraction (tEBSD) for grain boundary identification and positioning.
  • Optimized tEBSD parameters including sample tilt angles and ion beam milling energies.
  • Performed correlative analysis of a grain boundary in Inconel 600 using tEBSD and APT.

Main Results:

  • tEBSD imaging guided the precise placement of a targeted grain boundary within the APT specimen.
  • Optimized tEBSD parameters improved Kikuchi diffraction pattern quality for the APT specimen geometry.
  • Correlative analysis successfully characterized a grain boundary with a 50° misorientation.
  • Identified trace element segregation to the analyzed grain boundary.

Conclusions:

  • The integration of tEBSD with FIB-APT specimen preparation offers significant advantages for detailed grain boundary characterization.
  • This combined approach enhances the precision of APT analysis by improving specimen targeting.
  • The methodology provides comprehensive chemical and crystallographic insights into grain boundary phenomena.