Ultrahigh Frequency (100 MHz-300 MHz) Ultrasonic Transducers for Optical Resolution Medical Imagining

High resolution ultrasonic imaging requires high frequency wide band ultrasonic transducers, which produce short pulses and highly focused beam. However, currently the frequency of ultrasonic transducers is limited to below 100 MHz, mainly because of the challenge in precise control of fabrication parameters. This paper reports the design, fabrication, and characterization of sensitive broadband lithium niobate (LiNbO3) single element ultrasonic transducers in the range of 100-300 MHz, as well as their applications in high resolution imaging. All transducers were built for an f-number close to 1.0, which was achieved by press-focusing the piezoelectric layer into a spherical curvature. Characterization results demonstrated their high sensitivity and a -6 dB bandwidth greater than 40%. Resolutions better than 6.4 μm in the lateral direction and 6.2 μm in the axial direction were achieved by scanning a 4 μm tungsten wire target. Ultrasonic biomicroscopy images of zebrafish eyes were obtained with these transducers which demonstrate the feasibility of high resolution imaging with a performance comparable to optical resolution.