Nanoscale Capillary Flows in Alumina: Testing the Limits of Classical Theory

Anodic aluminum oxide (AAO) membranes have well-formed cylindrical channels, as small as 10 nm in diameter, in a close packed hexagonal array. The channels in AAO membranes simulate very small leaks that may be present for example in an aluminum oxide device encapsulation. The 10 nm alumina channel is the smallest that has been studied to date for its moisture flow properties and provides a stringent test of classical capillary theory. We measure the rate at which moisture penetrates channels with diameters in the range of 10 to 120 nm with moist air present at 1 atm on one side and dry air at the same total pressure on the other. We extend classical theory for water leak rates at high humidities by allowing for variable meniscus curvature at the entrance and show that the extended theory explains why the flow increases greatly when capillary filling occurs and enables the contact angle to be determined. At low humidities our measurements for air-filled channels agree well with theory for the interdiffusive flow of water vapor in air. The flow rate of water-filled channels is one order of magnitude less than expected from classical capillary filling theory and is coincidentally equal to the helium flow rate, validating the use of helium leak testing for evaluating moisture flows in aluminum oxide leaks.