Design and experimental demonstration of electromagnetic actuation utilized on micrograting accelerometers

Area of Science:

• Micro-electromechanical systems (MEMS)
• Electromagnetics
• Sensor technology

Background:

• Micro-electro-mechanical systems (MEMS) accelerometers are crucial for inertial sensing.
• Traditional accelerometers face limitations in actuation and sensitivity.
• Electromagnetic actuation offers a promising alternative for MEMS devices.

Purpose of the Study:

• To design, analyze, and experimentally demonstrate electromagnetic actuation for micrograting accelerometers.
• To investigate the performance characteristics of the electromagnetic actuation system.
• To establish the linear operating range and sensitivity of the developed accelerometer.

Main Methods:

• Utilized a design comprising a permanent magnet and a three-planar printed circuit board coil driving system.
• Fabricated the silicon movable platform, permanent magnet proof mass, cantilever beams via etching, and aluminum micrograting via lift-off.
• Conducted experimental tests to measure electromagnetic force, linear operating region, and sensitivity under varying driving voltages.

Main Results:

• Achieved a maximum electromagnetic force of 1.41 mN at 2.96 V driving voltage.
• Demonstrated a linear operating region of [-1g, 1g] with a driving voltage of -2.8 V to 2.96 V.
• Obtained a mean sensitivity of 2.82 V/g, with a calculated wider linear range of [-2.2g, 2.2g] at ±7 V.

Conclusions:

• The electromagnetic actuation system is effective for micrograting accelerometers.
• A linear relationship exists between driving voltage and input acceleration.
• The developed MEMS accelerometer exhibits promising performance for inertial sensing applications.