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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Aluminum nitride electro-optic phase shifter for backend integration on silicon

Shiyang Zhu, Guo-Qiang Lo

    Optics Express
    |July 14, 2016
    PubMed
    Summary

    Aluminum nitride (AlN) electro-optic phase shifters were fabricated on silicon using advanced semiconductor technology. These devices demonstrate promising modulation efficiency for integrated photonics applications.

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