Aluminum nitride electro-optic phase shifter for backend integration on silicon

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Updated: Mar 18, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

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Shiyang Zhu, Guo-Qiang Lo

    Optics Express
    |July 14, 2016
    PubMed

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