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Summary

This summary is machine-generated.

Microscope objectives with high numerical aperture (NA) require effective wavelength calibration. This study models how wavelength, coherence, and NA influence measurement accuracy, particularly the batwing effect, in interference microscopy.

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Area of Science:

Optical microscopy
Metrology
Nanotechnology

Background:

Numerical aperture (NA) and illumination wavelength impact fringe spacing in interference microscopy.
High NA values necessitate calibration for an effective wavelength.
The batwing effect in step height measurements is sensitive to the height-to-wavelength ratio (HWR).

Purpose of the Study:

To investigate the influence of effective wavelength, temporal, and spatial coherence on measurement results in high NA interference microscopy.
To introduce and compare two theoretical models for signal simulation under broadband illumination.
To analyze the batwing effect in relation to measurement parameters.

Main Methods:

Development of two theoretical signal modeling approaches: a Kirchhoff (analytical) model and a Richards-Wolf (numerical) model.
Inclusion of diffraction effects in both simulation models.
Experimental validation of simulation results using a rectangular grating.

Main Results:

Both models accurately predict measurement results for high NA systems.
Changes in effective wavelength, influenced by temporal and spatial coherence, correlate with the batwing effect.
Simulation results show good agreement with experimental data, validating the models.

Conclusions:

Effective wavelength calibration is crucial for accurate high NA interference microscopy.
Temporal and spatial coherence significantly affect measurement outcomes and the batwing effect.
The developed models provide a robust framework for understanding and mitigating errors in high NA microscopy.