Computational method for simulation of thermal load distribution in a lithographic lens

Area of Science:

• Optical Engineering
• Thermal Analysis
• Computational Physics

Background:

• Accurate temperature distribution of lenses is essential for thermal aberration prediction.
• Rigorous thermal simulation, particularly using the finite volume method, requires precise input of absorbed energy and its distribution within lens elements.

Purpose of the Study:

• To propose a computational method for simulating thermal load distribution in lenses.
• To ensure simulation accuracy by considering lens material absorption based on surface light intensity.

Main Methods:

• Developed a computational method to simulate thermal load distribution.
• The method is based on analyzing the light intensity on the surfaces of lens elements.
• An algorithm was introduced for the verification of the proposed method.

Main Results:

• The proposed method effectively simulates thermal load distribution.
• Verification algorithm confirmed the method's validity for lithographic lenses.
• Accurate temperature distribution can be acquired for thermal aberration prediction.

Conclusions:

• The presented computational method is an effective solution for thermal load distribution in lithographic lenses.
• This approach improves the accuracy of thermal simulations for optical systems.