Manipulation of TiO2 Nanotubes in a Transparent Dielectrophoretic Device

A DEP device with a transparent oxide thin film electrode was fabricated by a photolithography process and sputtering deposition with indium tin oxide (ITO). In order to form a fine ITO electrode pattern, we manipulated the negative slope using a photoresist by controlling the intensity of the ultra-violet radiation and the exposure time. In this study, the motions of a 1 microm polystyrene sphere and TiO2 nanotube were observed as a function of the applied voltage and the frequency. The findings confirm that TiO2 nanotubes can be manipulated by a p-DEP force and that they can be effectively aligned under conditions of 10 V(p-p) at 750 Hz.