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In Situ Detection and Single Cell Quantification of Metal Oxide Nanoparticles Using Nuclear Microprobe Analysis
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Uncertainty in Quantitative Electron Probe Microanalysis.

Kurt F J Heinrich1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 10899-0001.

Journal of Research of the National Institute of Standards and Technology
|July 23, 2016
PubMed
Summary

Quantitative electron probe analysis models, crucial for material characterization, are validated using well-analyzed specimens. This ensures the reliability of results derived from X-ray generation physics.

Keywords:
absorption coefficientsaccuracymicroanalysismodelsx-ray absorptionx-ray spectrometry

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Quantitative electron probe analysis (QEPA) relies on physical models of X-ray generation.
  • These models require empirical adjustments based on known material compositions.

Purpose of the Study:

  • To evaluate the accuracy of quantitative electron probe analysis models.
  • To establish a method for validating QEPA model performance.

Main Methods:

  • Application of established QEPA models to a set of reference materials.
  • Analysis of X-ray generation data from specimens with well-characterized compositions.

Main Results:

  • Empirical adjustments refine the accuracy of X-ray generation models.
  • Validation using known composition specimens provides an estimate of model reliability.

Conclusions:

  • The accuracy of QEPA models can be reliably estimated through validation with reference materials.
  • This approach is essential for ensuring precise elemental analysis in materials science.