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Uncertainty in Quantitative Electron Probe Microanalysis.
1National Institute of Standards and Technology, Gaithersburg, MD 10899-0001.
Quantitative electron probe analysis models, crucial for material characterization, are validated using well-analyzed specimens. This ensures the reliability of results derived from X-ray generation physics.
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Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Quantitative electron probe analysis (QEPA) relies on physical models of X-ray generation.
- These models require empirical adjustments based on known material compositions.
Purpose of the Study:
- To evaluate the accuracy of quantitative electron probe analysis models.
- To establish a method for validating QEPA model performance.
Main Methods:
- Application of established QEPA models to a set of reference materials.
- Analysis of X-ray generation data from specimens with well-characterized compositions.
Main Results:
- Empirical adjustments refine the accuracy of X-ray generation models.
- Validation using known composition specimens provides an estimate of model reliability.
Conclusions:
- The accuracy of QEPA models can be reliably estimated through validation with reference materials.
- This approach is essential for ensuring precise elemental analysis in materials science.

