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Updated: Mar 17, 2026

Thermal Measurement Techniques in Analytical Microfluidic Devices
Published on: June 3, 2015
The Microcalorimeter for Industrial Applications
Del Redfern1, Joe Nicolosi1, Jens Höhne2
1EDAX Inc., 91 McKee Dr., Mahwah, NJ 07430 USA.
Abstract:
To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain criteria must be addressed. Aspects of resolution, cooling and hold time, count rates as well as vibrations are considered. Data is presented to the present efforts to handle these issues as well as discussing development plans for the future.
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