Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor
Zong Yao1,2, Ting Liang3,4, Pinggang Jia5,6
1National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China. yaozong126@sina.com.
Sensors (Basel, Switzerland)
|July 26, 2016
Summary
A novel passive resistor temperature compensation technique accurately measures high-temperature pressure. This method uses differential equations, reducing temperature drift in piezoresistive pressure sensors for harsh environments.
Area of Science:
- Materials Science
- Electrical Engineering
- Mechanical Engineering
Background:
- High-temperature piezoresistive pressure sensors suffer from output voltage variations due to temperature changes, impacting measurement accuracy.
- Traditional compensation methods often rely on empirical approaches and are sensitive to fabrication variations and material property mismatches.
Purpose of the Study:
- To develop and validate a passive resistor temperature compensation technique for high-temperature piezoresistive pressure sensors.
- To overcome the limitations of existing compensation methods by employing a physics-based approach using differential equations.
Main Methods:
- A passive resistor temperature compensation technique was designed, with parameters determined via differential equations.
- The differential equations were solved using calibration data from uncompensated sensors.
- A high-temperature signal-conditioning circuit was integrated to enhance sensor output sensitivity.
Main Results:
- The proposed compensation technique demonstrated a significant reduction in temperature drift compared to traditional methods.
- Tests confirmed the effectiveness of the passive compensation in maintaining measurement accuracy across various temperatures and pressures.
- The integrated signal-conditioning circuit successfully mitigated sensitivity loss caused by compensation.
Conclusions:
- The differential equation-based passive resistor temperature compensation offers a robust solution for high-temperature pressure sensing.
- This technique is independent of piezoresistor variations and fabrication-induced stresses, enhancing reliability.
- The method shows high applicability for pressure measurements in extreme environments with substantial temperature fluctuations.
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