Calibration and optimization of an x-ray bendable mirror using displacement-measuring sensors

We propose a method to control and to adjust in a closed-loop a bendable x-ray mirror using displacement-measuring devices. For this purpose, the usage of capacitive and interferometric sensors is investigated and compared. We installed the sensors in a bender setup and used them to continuously measure the position and shape of the mirror in the lab. The sensors are vacuum-compatible such that the same concept can also be applied in final conditions. The measurement is used to keep the calibration of the system and to create a closed-loop control compensating for external influences: in a demonstration measurement, using a 950 mm long bendable mirror, the mirror sagitta is kept stable inside a range of 10 nm Peak-To-Valley (P-V).