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Updated: Mar 17, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Vighter Iberi1,2,3, Liangbo Liang1, Anton V Ievlev1,4
1Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
Defect engineering in 2D materials like Molybdenum Diselenide (MoSe2) using Helium Ion Microscopy (HIM) enables tailored optoelectronic properties. This technique locally modifies material characteristics, paving the way for advanced 2D devices.
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