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Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer
Applied Optics
|August 10, 2016
Summary
Residual stress in micromechanical accelerometer support arms was analyzed and reduced using silicon instead of aluminum. This significantly enhances scale factor linearity, improving accuracy for inertial navigation and positioning applications.
Area of Science:
- Mechanical Engineering
- Materials Science
- Sensor Technology
Background:
- Residual stress in micromechanical accelerometer support arms affects scale factor linearity.
- Aluminum support arms exhibit significant shape curvature due to residual stress.
Purpose of the Study:
- To propose a method for reducing residual stress in accelerometer support arms.
- To enhance the linearity of the scale factor in optical interrogated micromechanical accelerometers.
Main Methods:
- Detailed analysis of residual stress behavior in support arms.
- Finite element analysis (FEA) simulation of shape curvature.
- Comparison of aluminum and silicon support arm materials.
- Modified fabrication process to minimize residual stress.
- Contrast experiments using a force feedback test system.
Main Results:
- Silicon-made support arms exhibit significantly reduced residual stress compared to aluminum.
- The linearity of the scale factor for silicon-made support arms is 0.85%.
- This represents an order of magnitude improvement over aluminum-made support arms (7.48% linearity).
Conclusions:
- The proposed method effectively reduces residual stress in support arms.
- Linearity enhancement of the scale factor is validated by experimental results.
- Improved accuracy of optical interrogated micromechanical accelerometers for inertial navigation and positioning is achieved.
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