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Updated: Mar 16, 2026
Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries
Vinsensia Ade Sugiawati1, Florence Vacandio2, Marielle Eyraud1
1Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France.
Abstract:
We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg(-1) (23 μAhcm(-2)) is attained for the first cycle at C/10 to reach 65 mAhg(-1) (17 μAhcm(-2)) after 10 cycles with a good stability over 40 cycles.
