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Monolithically Integrated Microelectromechanical Systems for On-Chip Strain Engineering of Quantum Dots
Yang Zhang, Yan Chen, Michael Mietschke
1Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences , 110016, Shenyang, China.
Nano Letters
|August 31, 2016
Summary
This study introduces a Microelectromechanical systems (MEMS) device for precisely controlling quantum dot (QD) light emission. This on-chip platform enables advanced quantum photonic applications by engineering strain fields for tunable single-photon sources.
Area of Science:
- Materials Science
- Quantum Optics
- Nanotechnology
Background:
- Elastic strain fields precisely engineer quantum dot (QD) emission.
- Previous bulk piezoelectric substrates limited chip-scale device development.
Purpose of the Study:
- Develop a monolithically integrated Microelectromechanical systems (MEMS) device for on-chip quantum photonic applications.
- Create an on-chip strain tuning platform using piezoelectric thin films and QDs.
Main Methods:
- Grew high-quality epitaxial lead magnesium niobate-lead titanate (PMN-PT) thin films on strontium titanate (SrTiO3) buffered silicon (Si).
- Fabricated dense arrays of MEMS with small footprints for on-chip strain tuning.
- Transferred QD-containing nanomembranes onto the MEMS platform for strain engineering.
Main Results:
- Demonstrated excellent piezoelectric responses from the PMN-PT thin films.
- Engineered nonclassical emissions, such as single photons, from single QDs using strain fields.
- Developed individually addressable and monolithically integrated MEMS for tunable QD sources.
Conclusions:
- The developed MEMS device offers a promising platform for on-chip quantum photonic applications.
- Strain-tunable QD sources on integrated MEMS pave the way for complex quantum photonic circuits.
