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Tilting and moving-object lens for a 3D electron microscope.

Katsumi Ura1

  • 1Honorary Member, The Japanese Society of Microscopy, 1-14-9 Takakurachou, Miyakojima-ku, Osaka 534-0011, Japan ura_katsumi@mvb.biglobe.ne.jp.

Microscopy (Oxford, England)
|September 3, 2016
PubMed
Summary

Researchers electrically tilted electron microscope objective lenses, extending the moving-objective lens concept. This study analytically expresses potentials and numerically shows field distributions for tilted magnetic lenses.

Keywords:
LSI testingMOLlarge-angle tiltsmultipole expansionthree-dimensional electron microscope

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Area of Science:

  • Electron microscopy
  • Electromagnetic optics

Background:

  • The moving-objective lens (MOL) concept allows for aberration correction in electron microscopes.
  • Extending MOL capabilities can enhance 3D electron microscopy resolution and functionality.

Purpose of the Study:

  • To investigate the electrical tilting and movement of objective lenses in 3D electron microscopes.
  • To analytically express the electric or magnetic potential along a tilted optical axis.
  • To numerically analyze field distributions for tilted magnetic lenses.

Main Methods:

  • Analytical expression of potential using multipole expansion about the fixed central axis.
  • Numerical simulation of field distributions for axially symmetric dipole and quadrupole components.
  • Modeling of a bell-shaped magnetic lens tilted up to 60° around its center.

Main Results:

  • Analytical expressions for potentials along the tilted optical axis were derived.
  • Numerical field distributions for dipole and quadrupole components at various tilt angles were visualized.
  • Hexapole and octapole components were analyzed at a 45° tilt angle.

Conclusions:

  • Electrical control of objective lens tilting is feasible, extending the MOL concept.
  • The multipole expansion provides a framework for understanding potentials in tilted lens systems.
  • Numerical analysis reveals the behavior of magnetic fields under lens tilting, crucial for 3D electron microscopy applications.