PEALD YSZ-based bilayer electrolyte for thin film-solid oxide fuel cells

Wonjong Yu1, Gu Young Cho, Soonwook Hong

  • 1School of Mechanical and Aerospace Engineering, Seoul National University, San 56-1, Daehak dong, Gwanak-gu, Seoul 151-742, Korea.

Nanotechnology
|September 6, 2016
PubMed
Summary

Plasma enhanced atomic layer deposition (PEALD) of yttria-stabilized zirconia (YSZ) thin film electrolytes significantly improved solid oxide fuel cell performance. PEALD YSZ electrolytes offer higher power density and open circuit voltage compared to sputtered electrolytes.