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Accurate theoretical and experimental characterization of optical grating coupler
Optics Express
|September 9, 2016
Summary
This study simulates and fabricates an out-of-plane grating coupler, a key component in optical devices. Experimental results closely match simulations, validating the design and fabrication method for efficient light coupling.
Area of Science:
- Optics and Photonics
- Nanotechnology
- Materials Science
Background:
- Periodic structures are essential components in optical devices, serving as reflectors, filters, and couplers.
- Grating couplers, a type of periodic structure, are widely used for efficient light coupling in optical systems.
Purpose of the Study:
- To conduct a three-dimensional simulation of an out-of-plane grating coupler.
- To analyze guided wave propagation, leakage characteristics, and coupling efficiency.
- To numerically and experimentally validate the grating coupler's performance.
Main Methods:
- Three-dimensional simulation using a commercial software package based on the finite-element method.
- Numerical calculation of the complex propagation constant and radiation pattern.
- Fabrication of an optimized grating coupler using electron-beam lithography and plasma etching.
Main Results:
- Detailed analysis of guided waves and leakage characteristics.
- Evaluation of the grating coupler's coupling efficiency.
- Excellent agreement observed between simulation predictions and experimental measurements.
Conclusions:
- The demonstrated simulation and fabrication method effectively validates the performance of out-of-plane grating couplers.
- The study confirms the viability of using electron-beam lithography and plasma etching for fabricating high-performance grating couplers.
- The findings contribute to the advancement of optical device design and fabrication.

