Locally deformed-ring hybrid microlasers exhibiting stable unidirectional emission from a Si waveguide

We propose and demonstrate a locally deformed-ring (LDR) hybrid microlaser to realize stable unidirectional emission from a silicon waveguide. The coupled modes eliminate the competition between clockwise (CW) and counter-clockwise (CCW) modes, and the highly unidirectional characteristics are achieved with an enhanced mode quality factor based on a locally deformed notch in the LDR resonator. Using a divinylsiloxane-benzocyclobutene bonding technique, a LDR hybrid microlaser is fabricated vertically coupled to a silicon waveguide with a radius of 20 μm, a ring width of 4 μm and a notch width of 500 nm. The threshold current is 7 mA, and single-mode lasing is achieved with the side-mode suppression ratio of 27 dB. Nearly total unidirectional output from the CCW direction of a Si waveguide is demonstrated with a unidirectional ratio of 0.053.