Off-axis quartz-enhanced photoacoustic spectroscopy using a pulsed nanosecond mid-infrared optical parametric oscillator

A trace-gas sensor, based on quartz-enhanced photoacoustic spectroscopy (QEPAS), consisting of two acoustically coupled micro-resonators (mR) with an off-axis 20 kHz quartz tuning fork (QTF) is demonstrated. The complete acoustically coupled mR system is optimized based on finite-element simulations and is experimentally verified. The QEPAS sensor is pumped resonantly by a nanosecond pulsed single-mode mid-infrared optical parametric oscillator. The sensor is used for spectroscopic measurements on methane in the 3.1-3.5 μm wavelength region with a resolution bandwidth of 1  cm^-1 and a detection limit of 0.8 ppm. An Allan deviation analysis shows that the detection limit at the optimum integration time for the QEPAS sensor is 32 ppbv at 190 s, and that the background noise is due solely to the thermal noise of the QTF.