Removing Beam Current Artifacts in Helium Ion Microscopy: A Comparison of Image Processing Techniques

Area of Science:

• Materials Science
• Microscopy
• Image Processing

Background:

• Helium ion microscopy (HIM) offers high resolution and topographical contrast for diverse materials.
• Beam current instability, caused by contamination, leads to horizontal stripe artifacts in HIM images.
• Existing post-processing methods may not fully preserve image information.

Purpose of the Study:

• To investigate and develop effective post-processing techniques for removing stripe artifacts from HIM images.
• To identify a method that eliminates beam current fluctuation effects without compromising image data.
• To enhance the reliability and quality of HIM imaging for scientific research.

Main Methods:

• Evaluation of various image post-processing algorithms: median filtering, Gaussian blurring, fast Fourier transforms (FFT), and principal component analysis (PCA).
• Development and testing of a novel, simple artifact removal technique.
• Comparative analysis of artifact removal efficiency and preservation of image details.

Main Results:

• Identified specific post-processing methods capable of reducing or eliminating stripe artifacts.
• Developed a straightforward method that completely removes beam current fluctuation artifacts.
• Demonstrated that the proposed method preserves the full integrity of the original image information.

Conclusions:

• Stripe artifacts in HIM images can be successfully removed using targeted post-processing.
• A simple, effective method has been established for artifact removal, enhancing HIM image quality.
• This technique ensures the reliable use of HIM for high-resolution imaging of various materials.