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Updated: Mar 14, 2026

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
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Wavelength tunable integrated add-drop filter with 10.6 nm bandwidth adjustability.
Optics Express
|September 24, 2016
Summary
This study introduces a tunable add-drop filter using silicon-on-insulator technology. The device offers adjustable bandwidth and wavelength, crucial for optical communication networks.
Area of Science:
- Photonics
- Integrated Optics
- Nanofabrication
Background:
- Optical add-drop filters are essential components in wavelength-division multiplexing (WDM) systems.
- Existing filters often lack tunability, limiting their flexibility in dynamic optical networks.
Purpose of the Study:
- To design and characterize a silicon-on-insulator (SOI) based add-drop filter with independently tunable bandwidth and central wavelength.
- To demonstrate the thermo-optic tuning mechanism for achieving desired filter characteristics.
Main Methods:
- Device fabrication using electron-beam lithography.
- Thermo-optic tuning implemented via integrated metal heaters fabricated by a lift-off process.
- Characterization of transmission bandwidth and central wavelength tuning performance.
Main Results:
- Demonstrated tunable transmission bandwidth from 1.1 nm to 11.7 nm over a 1555 nm to 1573 nm wavelength range.
- Achieved over 4 nm of central wavelength tuning.
- Identified metal heater breakdown current as the limiting factor for further wavelength tuning.
Conclusions:
- The developed SOI add-drop filter provides significant bandwidth and wavelength tunability.
- The thermo-optic tuning approach is effective for dynamic control of optical filter parameters.
- Further improvements may require addressing limitations in heater design or material properties.
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