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Related Experiment Video

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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Angle selective backscattered electron contrast in the low-voltage scanning electron microscope: Simulation and

Q Wan1, R C Masters1, D Lidzey2

  • 1Department of Material Science and Engineering, University of Sheffield, Western Bank, Sheffield S10 2TN, UK.

Ultramicroscopy
|September 26, 2016
PubMed
Summary

New detectors and simulations enable high-contrast imaging of nanostructured carbon materials using low voltage scanning electron microscopy (LVSEM). This technique optimizes imaging conditions for compositional contrast, mapping material distribution at the nanoscale.

Keywords:
Angle selective SEMConcentric back scattered detectorLow-voltage scanning electron microscopyPolymerQuantitative back-scattered imaging

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Area of Science:

  • Materials Science
  • Electron Microscopy
  • Nanotechnology

Background:

  • Advanced detectors enhance imaging capabilities in low voltage scanning electron microscopes (LVSEM).
  • Beam deceleration in LVSEM offers improved resolution and contrast for nanostructured materials.
  • Understanding compositional contrast is crucial for analyzing complex material distributions.

Purpose of the Study:

  • To predict and optimize imaging conditions for achieving purely compositional contrast in LVSEM.
  • To model electron signal intensity using angle-selective back-scattered electron (BSE) detection.
  • To experimentally validate simulation predictions on various carbon-based nanomaterials.

Main Methods:

  • Utilizing Monte Carlo simulations to predict electron signal intensity under angle-selective BSE detection.
  • Employing a concentric back-scattered (CBS) detector with and without a deceleration field.
  • Experimental validation using amorphous carbon, copper, and complex nanostructured polymers (PNIPAM/PEGDA IPN, P3HT film).

Main Results:

  • Accurate prediction of electron signal intensity for angle-selective BSE imaging in LVSEM.
  • Experimental validation confirmed model predictions for compositional contrast.
  • Successful mapping of nano-scale composition and crystallinity in complex nanostructured materials.

Conclusions:

  • The developed model and detector system enable precise control over compositional contrast in LVSEM.
  • This approach allows for detailed nanoscale mapping of material distribution, avoiding topographical artifacts.
  • Optimized LVSEM imaging provides new insights into the structure of advanced carbon-based nanomaterials.