High-mechanical-frequency characteristics of optomechanical crystal cavity with coupling waveguide

Optomechanical crystals have attracted great attention recently for their ability to realize strong photon-phonon interaction in cavity optomechanical systems. By far, the operation of cavity optomechanical systems with high mechanical frequency has to employ tapered fibres or one-sided waveguides with circulators to couple the light into and out of the cavities, which hinders their on-chip applications. Here, we demonstrate larger-centre-hole nanobeam structures with on-chip transmission-coupling waveguide. The measured mechanical frequency is up to 4.47 GHz, with a high mechanical Q-factor of 1.4 × 10³ in the ambient environment. The corresponding optomechanical coupling rate is calculated and measured to be 836 kHz and 1.2 MHz, respectively, while the effective mass is estimated to be 136 fg. With the transmission waveguide coupled structure and a small footprint of 3.4 μm², this simple cavity can be directly used as functional components or integrated with other on-chip devices in future practical applications.