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Updated: Mar 13, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
An-Chih Yang1, Yun-Shiuan Li2, Chon Hei Lam1
1Department of Chemical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan. dunyen@ntu.edu.tw.
New ultra-low-k thin films using aluminosilicate nanotubes (AlSiNTs) and poly(vinyl alcohol) (PVA) show superior dielectric properties and mechanical strength compared to existing materials.
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