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Related Experiment Video

Updated: Mar 13, 2026

Layer-by-layer Synthesis and Transfer of Freestanding Conjugated Microporous Polymer Nanomembranes
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Layer-by-layer Synthesis and Transfer of Freestanding Conjugated Microporous Polymer Nanomembranes

Published on: December 15, 2015

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Ultra-thin graphene-polymer heterostructure membranes.

C N Berger1, M Dirschka2, A Vijayaraghavan1

  • 1School of Materials and National Graphene Institute, University of Manchester, Manchester M13 9PL, UK. aravind@manchester.ac.uk.

Nanoscale
|October 12, 2016
PubMed
Summary

We developed a high-yield fabrication method for ultra-thin graphene-polymer membranes, crucial for micro/nano-electromechanical systems (MEMS/NEMS). This technique precisely tunes mechanical properties for diverse applications.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Mechanical Engineering

Background:

  • Fabricating large-scale micro/nano-electromechanical systems (MEMS/NEMS) is hindered by challenges in producing ultra-thin conductive membranes.
  • Processing-induced stress and stiction issues limit the precision and yield of suspended structures.

Purpose of the Study:

  • To present a novel fabrication and mechanical characterization method for suspended graphene-polymer heterostructure membranes.
  • To address the challenge of creating high-yield membranes with preserved graphene mechanical properties for MEMS/NEMS applications.

Main Methods:

  • A micro-blister inflation technique was employed to measure the in-plane elastic modulus.
  • Fabrication of suspended membrane structures with wafer-scale multiplexing capability and 100% yield.

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Fabrication of Three-Dimensional Graphene-Based Polyhedrons via Origami-Like Self-Folding
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Electrophoretic Crystallization of Ultrathin High-performance Metal-organic Framework Membranes
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Electrophoretic Crystallization of Ultrathin High-performance Metal-organic Framework Membranes

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Last Updated: Mar 13, 2026

Layer-by-layer Synthesis and Transfer of Freestanding Conjugated Microporous Polymer Nanomembranes
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Layer-by-layer Synthesis and Transfer of Freestanding Conjugated Microporous Polymer Nanomembranes

Published on: December 15, 2015

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Fabrication of Three-Dimensional Graphene-Based Polyhedrons via Origami-Like Self-Folding
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  • Characterization of heterostructure membranes ranging from 18 nm to 235 nm in thickness.

    • Main Results:

    • The elastic modulus ranged from the 2D modulus of bare graphene (173 ± 55 N m⁻¹) to the bulk modulus of Parylene-C (3.6 ± 0.5 GPa).
    • Observed varying deflection mechanisms, adhesion, and delamination effects based on graphene-to-polymer thickness ratios.
    • Demonstrated a transition from membrane to plate behavior consistent with theoretical models.

    Conclusions:

    • The developed fabrication method enables high-yield production of suspended graphene-polymer membranes.
    • The mechanical properties of these ultra-thin conductive membranes can be precisely tuned for specific applications.
    • This approach facilitates the advancement of large-scale MEMS/NEMS by overcoming fabrication limitations.