Ultrasensitive Pressure Detection of Few-Layer MoS₂

Ultrasensitive pressure sensors are constructed with few-layer MoS₂ films. As-designed Fabry-Perot (F-P) sensors exhibit nearly synchronous pressure-deflection responses with a very high sensitivity (89.3 nm Pa^-1 ), which is three orders of magnitude higher than those of conventional diaphragm materials (e.g., silica, silver films). This kind of F-P sensor may open up new avenues for 2D materials in biomedical and environmental applications.