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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Scanning SQUID Study of Vortex Manipulation by Local Contact

Scanning SQUID Study of Vortex Manipulation by Local Contact

Published on: February 1, 2017

Scanning SQUID susceptometers with sub-micron spatial resolution.

John R Kirtley¹, Lisa Paulius², Aaron J Rosenberg¹

¹Department of Applied Physics, Stanford University, Stanford, California 94305-4045, USA.

The Review of Scientific Instruments

|October 27, 2016

Summary

This summary is machine-generated.

Scanning SQUID susceptometers now offer sub-micron spatial resolution for improved magnetic imaging. These advanced sensors maintain high sensitivity, enabling detailed analysis of magnetization and currents.

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Area of Science:

Physics
Materials Science
Nanotechnology

Background:

Superconducting Quantum Interference Device (SQUID) microscopy offers high magnetic field sensitivity.
Current limitations in SQUID microscopy include modest spatial resolution compared to other scanning probes.
Spatial resolution is primarily dictated by the sensor's sensitive area size and proximity to the sample.

Purpose of the Study:

To develop scanning SQUID susceptometers with enhanced sub-micron spatial resolution.
To maintain high magnetic flux sensitivity while improving spatial resolution.
To create a versatile tool for imaging sample magnetization, currents, and susceptibilities.

Main Methods:

Fabrication of deep sub-micron feature sizes for the SQUID pickup loops.
Implementation of a planarized process for well-shielded pickup loops.
Utilizing a deep etch step to minimize the sample-to-sensor spacing.

Main Results:

Achieved sub-micron spatial resolution in scanning SQUID susceptometers.
Retained a white noise floor flux sensitivity of approximately 2μΦ₀/Hz¹/².
Integrated modulation coils for flux feedback and field coils for susceptibility measurements.

Conclusions:

The developed scanning SQUID susceptometers provide a significant advancement in spatial resolution for magnetic imaging.
These sensors are a generally applicable tool for high-resolution imaging of sample magnetization, currents, and susceptibilities.
The integrated functionalities and batch processing capabilities enhance their utility in various research applications.