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An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne

Shanzhi Tang¹, Shengrui Yu², Qingfu Han¹

¹Laboratory of X-ray Optics and Technology, Institute of High Energy Physics, CAS, Beijing 100049, China.

The Review of Scientific Instruments

|October 27, 2016

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This study introduces a novel algorithm and optical setup for circular tests, improving motion accuracy assessment in machine tools. The method accurately measures radial deviation and circular hysteresis, reducing setup errors in metrology.

Area of Science:

Metrology and Measurement Science
Mechanical Engineering and Machine Tools
Optical Engineering

Background:

Circular tests are crucial for evaluating motion accuracy in precision machinery.
Existing methods for circular testing, both contact and non-contact, suffer from setup errors due to instrument centering.
There is a need for improved non-contact methods offering higher accuracy and reduced systematic errors.

Purpose of the Study:

To propose a new algorithm for circular tests based on matrix operations to address setup errors.
To develop an improved optical configuration using a 2D laser heterodyne interferometer for enhanced measurement.
To accurately determine radial deviation (F) and circular hysteresis (H), along with other evaluation parameters.

Main Methods:

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Development of a function construction algorithm utilizing matrix operations for circular data analysis.

Implementation of an improved optical configuration with a single laser for a 2D laser heterodyne interferometer.

Modeling of the algorithm and optical system, including error budget analysis.

Experimental validation using a gantry machining center to test motion paths.

Main Results:

The proposed algorithm successfully calculates radial deviation (F) and circular hysteresis (H).
The improved optical configuration provides purer homogeneity of laser sources for 2D displacement sensing.
Experimental results from a gantry machining center validate the effectiveness of the proposed algorithm and setup.
The new method demonstrates a significant reduction in setup-related errors compared to existing techniques.

Conclusions:

The matrix-operation-based algorithm and the improved optical configuration effectively enhance circular test accuracy.
This approach offers a more reliable and precise method for assessing motion accuracy in machine tools and coordinate measuring machines.
The validated system provides a robust solution for advanced metrology applications requiring high precision.