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A single-step lithography system based on an enhanced robotic adhesive dispenser
Jiyao Xing1, Weibin Rong1, Ding Sun1
1State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, 2 Yikuang, C1 HIT Science Park, 150080 Harbin, People's Republic of China.
The Review of Scientific Instruments
|October 27, 2016
Summary
We developed a single-step lithography system using robotically controlled micro-extrusion to create microscale resist adhesive patterns. This method allows for convenient regulation of feature size for microfabrication applications.
Area of Science:
- Materials Science
- Nanotechnology
- Microfabrication
Background:
- Traditional microfabrication techniques can be complex and costly.
- There is a need for simpler, more flexible methods for creating microscale patterns.
Purpose of the Study:
- To present a novel single-step lithography system for direct microscale pattern generation.
- To demonstrate the system's ability to control feature size and create microstructures.
Main Methods:
- Modification of a robotic adhesive dispenser with a micro-aperture nozzle.
- Robotically controlled micro-extrusion of resist adhesive onto a substrate.
- Experimental investigation of working parameters (writing speed, time, pressure) for feature size control.
- Application of the system for patterning silicon dioxide and creating silicon microstructures via wet etching.
Main Results:
- Successful direct creation of resist adhesive patterns at the microscale.
- Demonstrated convenient regulation of line width and dot diameter by adjusting working factors.
- Fabrication of line features on silicon dioxide and square-like silicon microstructures.
Conclusions:
- The developed system offers a simple and flexible alternative for microfabrication.
- This micro-extrusion-based lithography facilitates the development of microscale devices and structures.
