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Updated: Mar 12, 2026

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Near-field characterization of a Bloch-surface-wave-based 2D disk resonator
Optics Letters
|November 3, 2016
Abstract:
We present, to the best of our knowledge, the first experimental investigation of a two-dimensional disk resonator on a dielectric multilayer platform sustaining Bloch surface waves. The disk resonator has been patterned into a few tens of nanometer thin (∼λ/25) titanium dioxide layer deposited on the top of the platform. We characterize the disk resonator by multi-heterodyne scanning near-field optical microscopy. The low loss characteristics of Bloch surface waves allowed us to reach a measured quality factor of 2×103 for a disk radius of 100 μm.
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