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A Mathematical Model for Determining Carbon Coating Thickness and Its Application in Electron Probe Microanalysis.

Ruo-Xi Zhang1, Shui-Yuan Yang1

  • 1State Key Laboratory of Geological Processes and Mineral Resources,China University of Geosciences,Wuhan 430074,PR China.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|November 5, 2016
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Summary

Carbon coating thickness in electron probe microanalysis varies with specimen location. Optimizing specimen placement and using a rotating coater plate can minimize thickness variations, improving analytical accuracy.

Keywords:
carbon coatingelectron probe microanalysisfilm thickness calculationfilm thickness variation

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Surface Science

Background:

  • Electron probe microanalysis (EPMA) requires conductive carbon coatings on specimens.
  • Variations in carbon coating thickness can introduce significant errors in X-ray intensity measurements, especially for low-energy X-rays.
  • Inconsistent coating thickness between specimens and standards is a critical issue affecting analytical precision.

Purpose of the Study:

  • To investigate how specimen location and distance from the carbon source affect carbon film thickness during coating.
  • To develop a mathematical model for predicting carbon film thickness distribution.
  • To propose strategies for achieving uniform carbon coating thickness.

Main Methods:

  • Experimental observation of carbon film deposition based on specimen position relative to the carbon tip.
  • Development of a mathematical model assuming isotropic carbon atom evaporation.
  • Analysis of factors influencing coating uniformity.

Main Results:

  • Specimen proximity to the carbon tip directly correlates with deposited carbon film thickness; closer proximity results in thicker coatings.
  • A mathematical model was established to calculate carbon film thickness variations across the coater plate.
  • Significant differences in coating thickness were observed based on specimen placement.

Conclusions:

  • Specimen positioning is a critical parameter for controlling carbon coating thickness in EPMA.
  • Implementing strategies such as adjusting carbon rod height, strategic sample placement (thin samples centered, thick samples at edges), and using a rotating coater plate can significantly improve coating uniformity.
  • Reducing coating thickness variations enhances the accuracy of electron probe microanalysis results.