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An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications.

Mohtashim Mansoor1,2, Ibraheem Haneef3,4, Suhail Akhtar5

  • 1Institute of Avionics and Aeronautics, Air University, E-9, Islamabad 44000, Pakistan. mohtashimmansoor@gmail.com.

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|November 10, 2016
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Summary
This summary is machine-generated.

A novel Silicon-on-Insulator (SOI) CMOS multi-sensor chip integrates temperature, pressure, and flow rate sensors for fluid dynamics research. This chip offers dense sensor packing and simultaneous measurements, advancing experimental capabilities.

Keywords:
CMOSDRIEMEMSSOIaerospacedense sensor packingfluid dynamicsmulti-sensorpiezoresistive pressure sensorsensor systemthermal flow rate sensorthermodiodes

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Integrated Circuits
  • Sensor Technology

Background:

  • Experimental fluid dynamics research requires precise, simultaneous measurement of multiple parameters.
  • Existing sensor technologies often face limitations in integration density and multi-parameter sensing capabilities.

Purpose of the Study:

  • To develop and characterize a Silicon-on-Insulator (SOI) CMOS multi-sensor chip capable of simultaneously measuring temperature, pressure, and flow rate.
  • To enable dense sensor packing for advanced fluid dynamics experiments.

Main Methods:

  • Fabrication of a multi-sensor chip using SOI CMOS technology and Deep Reactive Ion Etching (DRIE).
  • Integration of ten thermodiodes, a piezoresistive pressure sensor, and nine hot-film flow rate sensors.
  • Independent characterization of each sensor type using dedicated apparatuses.

Main Results:

  • Thermodiodes demonstrated sensitivities of 1.41-1.79 mV/°C across 20-300 °C.
  • The pressure sensor exhibited a sensitivity of 0.0686 mV/(Vexcit kPa) with 0.25% non-linearity up to 69 kPa.
  • The flow rate sensor achieved a linearized sensitivity of 17.3 mV/(L/min)-0.1 from 0-4.7 L/min.

Conclusions:

  • The developed SOI CMOS multi-sensor chip successfully integrates temperature, pressure, and flow rate sensing.
  • The chip's dense sensor packing and simultaneous measurement capabilities are highly suitable for experimental fluid dynamics.
  • Potential applications extend to aerospace, automotive, biomedical, and process industries requiring multi-parameter fluidic monitoring.