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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

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Removal of all mosaic grating errors in a single-interferometer system by a phase-difference reference window.

Yuxian Lu, Xiangdong Qi, Xiaotian Li

|November 10, 2016

Summary

This summary is machine-generated.

A novel interference method precisely removes mosaic grating errors using a phase-difference reference window. This technique eliminates longitudinal and other grating errors, offering high accuracy for angle and position measurements.

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Area of Science:

Optical Metrology
Grating Interferometry
Precision Engineering

Background:

Mosaic gratings are crucial optical components but susceptible to various errors.
Existing methods for grating error correction are often complex or limited in scope.

Purpose of the Study:

To propose and validate a new interference method for comprehensive mosaic grating error removal.
To enhance measurement accuracy and simplify optical system design.

Main Methods:

Utilized a phase-difference reference window created with a small-aperture prism.
Introduced dual angles of incidence and optical paths to resolve longitudinal errors.
Developed a mathematical model and optical arrangement for simulation and experimentation.

Main Results:

Successfully eliminated longitudinal mosaic grating errors and all other associated errors.
Achieved high accuracy for angle mosaic errors (<1 μrad) and position mosaic errors (nanometer level).
Demonstrated superior performance compared to far-field diffraction methods in terms of complexity and accuracy.

Conclusions:

The proposed interference method effectively removes all mosaic grating errors.
This technique offers a simpler and more accurate alternative for grating metrology.
The findings have significant implications for precision optical system fabrication and alignment.