Shift-bonded resonance-domain diffraction gratings

Resonance-domain-transmission diffractive optics with grating periods comparable to those of the illumination wavelength offers large angles of light deflection and nearly 100% Bragg diffraction efficiency. Optical design preferences for nearly normal incidence can be met by proper choice for the slant of the diffraction grooves relative to the substrate. However, straightforward fabrication of the slanted submicron high-aspect-ratio grooves is challenging. In this paper, optical performance comparable to that of the slanted grooves was achieved by an alternative solution of bonding two half-height symmetrical gratings with a lateral shift and an optional small longitudinal spacing. Results of design, nanofabrication, and optical testing are presented.