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Updated: Mar 12, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
More Zernike modes' open-loop measurement in the sub-aperture of the Shack-Hartmann wavefront sensor
Abstract:
The centroid-based Shack-Hartmann wavefront sensor (SHWFS) treats the sampled wavefronts in the sub-apertures as planes, and the slopes of the sub-wavefronts are used to reconstruct the whole pupil wavefront. The problem is that the centroid method may fail to sense the high-order modes for strong turbulences, decreasing the precision of the whole pupil wavefront reconstruction. To solve this problem, we propose a sub-wavefront estimation method for SHWFS based on the focal plane sensing technique, by which more Zernike modes than the two slopes can be sensed in each sub-aperture. In this paper, the effects on the sub-wavefront estimation method of the related parameters, such as the spot size, the phase offset with its set amplitude and the pixels number in each sub-aperture, are analyzed and these parameters are optimized to achieve high efficiency. After the optimization, open-loop measurement is realized. For the sub-wavefront sensing, we achieve a large linearity range of 3.0 rad RMS for Zernike modes Z2 and Z3, and 2.0 rad RMS for Zernike modes Z4 to Z6 when the pixel number does not exceed 8 × 8 in each sub-aperture. The whole pupil wavefront reconstruction with the modified SHWFS is realized to analyze the improvements brought by the optimized sub-wavefront estimation method. Sixty-five Zernike modes can be reconstructed with a modified SHWFS containing only 7 × 7 sub-apertures, which could reconstruct only 35 modes by the centroid method, and the mean RMS errors of the residual phases are less than 0.2 rad2, which is lower than the 0.35 rad2 by the centroid method.

