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Updated: Mar 12, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
A new modal phase measuring deflectometry method uses mathematical models to reconstruct surface shapes. This approach optimizes model coefficients by comparing ray tracing to actual measurements, proving effective in simulations and experiments.
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