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Laser differential confocal interference multi-parameter comprehensive measurement method and its system for

Weiqian Zhao, Lirong Qiu, Yang Xiao

|November 10, 2016

Summary

A new laser differential confocal interference multi-parameter measurement (DCIMPM) method enhances spherical lens analysis. This technique achieves high accuracy for radius, thickness, refractivity, and surface figure on a single instrument.

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Area of Science:

Optical metrology
Precision engineering
Lens manufacturing

Background:

Current multi-parameter measurements for spherical lenses suffer from low accuracy and efficiency.
Existing methods often require multiple instruments, increasing complexity and cost.

Purpose of the Study:

To introduce a novel laser differential confocal interference multi-parameter measurement (DCIMPM) method for spherical lenses.
To develop a comprehensive measurement system based on the DCIMPM for simultaneous, high-accuracy parameter determination.

Main Methods:

The DCIMPM system integrates laser differential confocal techniques for radius of curvature, thickness, and refractivity measurements.
Laser interference techniques are employed for precise surface figure assessment.
A single instrument is utilized for all multi-parameter measurements.

Main Results:

Achieved measurement accuracy: 5 × 10^-6 for lens radius, 2.5 × 10^-4 for thickness, and 2.2 × 10^-4 for refractivity.
Surface figure measurement accuracy reached a peak-to-valley of λ/20.
Demonstrated high-accuracy, multi-parameter comprehensive measurements on a single platform.

Conclusions:

The proposed DCIMPM method offers a significant advancement in spherical lens metrology.
The developed system provides a novel, efficient, and accurate approach for comprehensive spherical lens characterization.
This technology enables high-precision quality control in optical component manufacturing.