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Updated: Mar 12, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tunable guided-mode resonance filter with a gradient grating period fabricated by casting a stretched PDMS grating
Abstract:
A compact, tunable guided-mode resonant filter (GMRF) is experimentally demonstrated whose spectral reflectance wavelength varies as a function of the illumination position on the device. The GMRF consists of a grating of gradient-varying period ranging from 402.5 to 466.6 nm, which is obtained by casting a stretched polydimethylsiloxane (PDMS) grating wedge. By spatially changing the illumination position on the GMRF over 11 mm, a spectral reflectance peak with low sidelobes varies from 596.8 to 684.1 nm. The influence on the resonance efficiency and the limitation of the wavelength tuning range are discussed in depth. The GMRF is a good candidate as a functional filtering component in wavelength selection and sensing applications.

