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Thin film growth studies using time-resolved x-ray scattering.

Stefan Kowarik¹

¹Institut für Physik, Humboldt Universität zu Berlin, Newtonstr. 15, 12489 Berlin, Germany.

Journal of Physics. Condensed Matter : an Institute of Physics Journal

|November 23, 2016

Summary

This review covers in situ real-time X-ray techniques for studying thin-film growth dynamics. These methods help determine structure and morphology, aiding the development of novel functional materials and devices.

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Area of Science:

Materials Science
Surface Science
Condensed Matter Physics

Background:

Thin-film growth is crucial for developing advanced functional materials and next-generation electronic devices.
Understanding the non-equilibrium growth physics, influenced by parameters like diffusion and Ehrlich-Schwoebel barriers, presents significant challenges.

Purpose of the Study:

To review in situ real-time X-ray techniques for characterizing thin-film structure and morphology.
To demonstrate the application of these techniques in understanding atomic-scale growth processes.
To bridge the gap between experimental data and theoretical models.

Main Methods:

Utilized in situ real-time X-ray diffraction (XRD) for structural determination.
Employed X-ray growth oscillations to monitor layer-by-layer growth dynamics.
Applied grazing-incidence small-angle X-ray scattering (GISAXS) for morphological analysis across various length scales (Å to µm).

Main Results:

Demonstrated the capability of XRD, growth oscillations, and GISAXS to probe thin-film growth in real-time.
Presented time-resolved growth experiments for molecular thin films and inorganic materials grown via molecular beam epitaxy (MBE) and electrochemical deposition.
Showcased the determination of scaling parameters for rate equation models and energy barriers for kinetic Monte Carlo simulations from X-ray data.

Conclusions:

In situ real-time X-ray techniques provide powerful tools for elucidating complex thin-film growth phenomena.
These methods enable quantitative analysis of structure and morphology, crucial for materials design.
The integration of experimental X-ray data with theoretical models facilitates a deeper understanding of growth kinetics and energy landscapes.