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3D heterostructures and systems for novel MEMS/NEMS
Victor Yakovlevich Prinz1, Vladimir Alexandrovich Seleznev1, Alexander Victorovich Prinz1
1Institute of Semiconductor Physics, Russian Academy of Sciences, Siberian Branch, Lavrent'ev Avenue 13, Novosibirsk 630090, Russia.
Science and Technology of Advanced Materials
|November 24, 2016
Summary
Solid micro- and nanostructures are key building blocks for micro- and nano-electro-mechanical systems (MEMS/NEMS). This review highlights their diverse applications and future potential, including tunable quantum properties in NEMS.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Micro- and nano-electro-mechanical systems (MEMS/NEMS) leverage micro- and nanostructures as fundamental components.
- Exploring diverse shapes of solid micro- and nanostructures is crucial for advancing MEMS/NEMS technology.
Approach:
- This review examines the application of various solid micro- and nanostructures as building blocks for MEMS/NEMS.
- It presents practical examples and novel devices developed using MEMS/NEMS fabrication techniques.
Key Points:
- Highlights include high-power electrostatic nanoactuators, fast-response tubular anemometers for flow measurement, nanoprinters, and nanosyringes.
- Optical MEMS/NEMS and devices with tunable quantum properties represent emerging frontiers.
Conclusions:
- Solid micro- and nanostructures are versatile building blocks with expanding applications in MEMS/NEMS.
- Future research directions point towards NEMS with tunable quantum properties, offering new technological possibilities.
