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Modeling of metastable phase formation diagrams for sputtered thin films

Keke Chang1, Denis Music1, Moritz To Baben1

  • 1Materials Chemistry, RWTH Aachen University , D-52074 Aachen , Germany.

Science and Technology of Advanced Materials
|November 24, 2016
PubMed

Keywords:
300 Processing/Synthesis and Recycling306 Thin film/Coatings307 Kinetics and energy/mass transport40 Optical, magnetic and electronic device materials400 Modeling/Simulations401 1st principle calculations403 CALPHAD/Phase field methodsCombinatorial magnetron sputteringCu–W and Cu–Vmetastable phase formation diagramsurface diffusion distancethin film growth

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