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CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials.

Sung Pil Lee¹, Ji Gong Lee², Shaestagir Chowdhury³

¹Department of Electronic Engineering, Kyungnam University, Masan, Kyungnam 631-701, Korea. sensors@kyungnam.ac.kr.

Sensors (Basel, Switzerland)

|November 24, 2016

Summary

This study presents an integrated humidity sensor system using nano-structured carbon nitride film. The novel system, fabricated with CMOS technology, demonstrates high sensitivity for humidity detection.

Keywords:

CMOS Carbon nitride film Humidity Integrated sensors

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Area of Science:

Materials Science
Electrical Engineering
Sensor Technology

Background:

Integrated sensor systems are crucial for environmental monitoring.
Developing sensitive and reliable humidity sensing materials is an ongoing challenge.
Carbon nitride (CNx) nanomaterials show promise for sensing applications.

Purpose of the Study:

To fabricate an integrated humidity sensor system using nano-structured carbon nitride (CNx) film.
To evaluate the performance of the CNx-based humidity sensor.
To integrate the humidity sensor with other components on a single chip.

Main Methods:

Fabrication of the sensor system using a 0.8 μm analog mixed CMOS process.
Deposition of CNx film via reactive RF magnetron sputtering.
Patterning of CNx film using the lift-off technique.
Integration of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and operational amplifier.

Main Results:

The integrated sensor system was successfully fabricated.
The drain current was found to be proportional to the dielectric constant of the sensing material.
A sensitivity of 2.8 μA/%RH was achieved for the humidity sensor.

Conclusions:

Nano-structured carbon nitride film is a viable material for humidity sensing.
The integrated CMOS sensor system offers a promising platform for humidity detection.
The developed sensor exhibits good sensitivity for environmental monitoring applications.