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CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials
Sung Pil Lee1, Ji Gong Lee2, Shaestagir Chowdhury3
1Department of Electronic Engineering, Kyungnam University, Masan, Kyungnam 631-701, Korea. sensors@kyungnam.ac.kr.
Sensors (Basel, Switzerland)
|November 24, 2016
Summary
This study presents an integrated humidity sensor system using nano-structured carbon nitride film. The novel system, fabricated with CMOS technology, demonstrates high sensitivity for humidity detection.
Area of Science:
- Materials Science
- Electrical Engineering
- Sensor Technology
Background:
- Integrated sensor systems are crucial for environmental monitoring.
- Developing sensitive and reliable humidity sensing materials is an ongoing challenge.
- Carbon nitride (CNx) nanomaterials show promise for sensing applications.
Purpose of the Study:
- To fabricate an integrated humidity sensor system using nano-structured carbon nitride (CNx) film.
- To evaluate the performance of the CNx-based humidity sensor.
- To integrate the humidity sensor with other components on a single chip.
Main Methods:
- Fabrication of the sensor system using a 0.8 μm analog mixed CMOS process.
- Deposition of CNx film via reactive RF magnetron sputtering.
- Patterning of CNx film using the lift-off technique.
- Integration of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and operational amplifier.
Main Results:
- The integrated sensor system was successfully fabricated.
- The drain current was found to be proportional to the dielectric constant of the sensing material.
- A sensitivity of 2.8 μA/%RH was achieved for the humidity sensor.
Conclusions:
- Nano-structured carbon nitride film is a viable material for humidity sensing.
- The integrated CMOS sensor system offers a promising platform for humidity detection.
- The developed sensor exhibits good sensitivity for environmental monitoring applications.
